Production Test RF Calibration for Multi-DUT Probe Cards: How to Get the Most Accurate Measurements

The most accurate measurement in a multi-site application is to make a calibration substrate that mirrors the multi-site layout. This controls all of the RF traces for the highest correlation between sites. In order to improve Cost of Ownership, many companies are moving to multi-DUT test to increase number of wafers tested per probe card and to increase speed of test with lower number of index steps. When performing a calibration, there are tradeoffs between the type of standards measured and...

From: Cascade Microtech, a FormFactor Company